• +41 (0)32 926 26 06
  • info@plasmadiam.com
  • +41 (0)32 926 26 06
  • info@plasmadiam.com
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Compressors

Compressors

Improve vacuum

Edwards CTI-Cryogenics offers a choice of compressors designed to provide optimum performance with On-Board Cryopumps, Cryo-Torr Cryopumps and/or On-Board Waterpumps. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Edwards vacuum pumps.

Edwards CTI-Cryogenics range of compressors

8200 Compressor

  • Designed to provide optimum performance with On-Board Cryopumps, On-Board Waterpumps and Cryo-Torr Cryopumps, this compressor supports all pumps up to eight inches in size. Because the 8200 is designed for flexibility, you can locate the compressor wherever it is most convenient for your system operation.
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9600 Compressor

  • Designed expressly for long usable life, high reliability and ease of use, this compressor provides outstanding performance with all Cryo-Torr Cryopumps, On-Board Cryopumps, On-Board Waterpumps and On-Board TurboPlus Vacuum Pumps. The 9600 supports both single- and grouped-pump configurations and is compatible with CTI-Cryogenics pumping installations worldwide.
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9700A Compressor

  • With increased helium output, the 9700A Compressor is ideal for operating multiple cryopumps. In many multiple cryopump and waterpump applications, one 9700A Compressor provides a single compressor solution. The 9700A Compressor, which reduces power consumption, water distribution and footprint when compared to multiple compressor applications, is compatible with Cryo-Torr and On-Board Cryopumps.
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IS Compressors

  • IS-1000 Compressor - intelligent, high efficiency compressor technology for On-Board IS Cryopumps. The IS-1000 Compressor supports up to six On-Board IS-8F Cryopumps in the same footprint as a 9600 Compressor. IS-2000V Compressor - delivers lowest power usage at all phases of operation via the combination of higher pressure, rotary technology and adaptable helium delivery aligning with SEMI S-23 objectives. The IS-2000V replaces two On-Board IS-1000 compressors. This high capacity helium compressor is designed to support On-Board IS Cryopump applications. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications.
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S800

Compact hard PVD
Functional Coating

  • Compact system (W3400 x D3000 x H2300mm)
  • Utilities in a single part of the unit
  • Extremely short utility commissioning
  • Fast to install

General Information

  • Technology : Arc
  • Dimensions : W3400 x D3000 x H2300 mm
  • Vacuum chamber size : W800 x D800 x H1,150 mm
  • Vacuum chamber capacity : 730 l
  • Using plasma volume : D=550 x H720
  • Target : 727×178×18 mm (3Set) - 200/400/400A
  • Turntable : D436 × H727 mm
  • Power : 3×400V/120 kW
  • Software : Industrial PC system Simple and easy diagnosis and description system Remote diagnosis through data machine or IP

Coating types

  • Standards Coating : TiN, CrN, TiCN, TiAlN, AlTiN, etc.
  • Recipes can be selected : AlCrN, TiAlSiN, AlCrTiN, DLC, etc.
  • Capacity (24H)
  • Milling cutter : D6×50 mm = 1,800×5 = 9,000 pces - D16×95 mm = 450×5= 2,250 pces
  • Insert : D20×H6 mm = 2,340×5 = 11,700 pces
  • Hobs : D80×180 mm =24×5= 120 pces

Testing Chamber

Applications : The bench top system offered allows to reach and maintain pressures equivalent to “O” meter (Atmospheric pressure) to high level such 4000 meters and beyond, inside a test chamber.

Atmospheric Pressure Simulator Chamber

  • Programmable vacuum controller

High Vacuum Pumping Stations

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.
Plug & Pump

PLASMADIAM TURBOMOLECULAR PUMPING STATION:

  • Range of turbomolecular pump options
  • Choice of turbomolecular pump with speeds ranging from 85 to 930 ls-1
  • Choice of dry backing pumps with capacities ranging from 6 to 90 m3h-1

Vacuum Heat Treatment Furnace

Heat treatment to fix the shape of the spiral spring. The fixing heat treatment is carried out under the following conditions :
  • Between 10-7 mbar and 10-5 mbar, in an inert atmosphere
  • Temperature between 400°C and 1000°C
  • Time between 1h and 6h

Advantages of vacuum furnaces

  • Controlled heating
  • Reproducible process
  • High efficiency
  • Fasting heating & cooling
  • High Vacuum Pumping Group

Ultra High Vacuum System Bake Out

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.

Example

  • Temperature 300 degrees
  • Vacuum level 5.10-10 mbar
  • Fully automated cycles
  • LOG recording