Providing low operating costs and fast, easy maintenance, these cryopumps deliver high reliability and bottom-line performance backed by responsive service you can count on. For added flexibility, you can add your own customised controls and supporting peripherals to meet your specific application needs.
Edwards CTI-Cryogenics Cryo-Torr Cryopumps set the benchmark.
Cryo-Torr Pump Model | 8 | 8F | 10 | 10F | 400 | ||
---|---|---|---|---|---|---|---|
Configuration | Straight | Flat | Straight | Flat | Straight | ||
Vacuum Flange ID (Metal Seal, ANSI, ISO) | 200 mm | 200 mm | 290 mm | 300 mm | 400 mm | ||
Gas Pumping Speeds | |||||||
Water | Liters/Sec | 4,000 | 4,000 | 9,000 | 9,500 | 16,000 | |
Air | Liters/Sec | 1,500 | 1,500 | 3,000 | 3,600 | 6,000 | |
Hydrogen | Liters/Sec | 2,500 | 2,200 | 5,000 | 6,000 | 5,000 | |
Argon | Liters/Sec | 1,200 | 1,200 | 2,500 | 3,000 | 5,000 | |
Gas Capacities | |||||||
Hydrogen | Standard Liters | 17 | 8 | 24 | 24 | 15 | |
Argon | Standard Liters | 1,000 | 1,000 | 2,000 | 2,000 | 2,500 | |
Throughput | |||||||
Argon | Sccm | 700 | 700 | 1,500 | 1,500 | 500 | |
Argon | Torr-Liters/Sec | 9 | 9 | 19 | 19 | 6 | |
Crossover | Torr-Liters | 150 | 150 | 300 | 300 | 300 | |
Cooldown Time | |||||||
60 Hertz | 90 min | 90 min | 100 min | 100 min | 150 min | ||
50 Hertz | 110 min | 110 min | 120 min | 120 min | 180 min | ||
Cryopump Weight | |||||||
Lbs | 45 | 42 | 85 | 90 | 160 | ||
Kg | 20 | 19 | 39 | 41 | 73 | ||
Standard products shown. Please contact us for custom configurations and specifications. |