Edwards CTI-Cryogenics Cryo-Torr Cryopumps set the benchmark.
| Cryo-Torr Pump Model | 8 | 8F | 10 | 10F | 400 | ||
|---|---|---|---|---|---|---|---|
| Configuration | Straight | Flat | Straight | Flat | Straight | ||
| Vacuum Flange ID (Metal Seal, ANSI, ISO) | 200 mm | 200 mm | 290 mm | 300 mm | 400 mm | ||
| Gas Pumping Speeds | |||||||
| Water | Liters/Sec | 4,000 | 4,000 | 9,000 | 9,500 | 16,000 | |
| Air | Liters/Sec | 1,500 | 1,500 | 3,000 | 3,600 | 6,000 | |
| Hydrogen | Liters/Sec | 2,500 | 2,200 | 5,000 | 6,000 | 5,000 | |
| Argon | Liters/Sec | 1,200 | 1,200 | 2,500 | 3,000 | 5,000 | |
| Gas Capacities | |||||||
| Hydrogen | Standard Liters | 17 | 8 | 24 | 24 | 15 | |
| Argon | Standard Liters | 1,000 | 1,000 | 2,000 | 2,000 | 2,500 | |
| Throughput | |||||||
| Argon | Sccm | 700 | 700 | 1,500 | 1,500 | 500 | |
| Argon | Torr-Liters/Sec | 9 | 9 | 19 | 19 | 6 | |
| Crossover | Torr-Liters | 150 | 150 | 300 | 300 | 300 | |
| Cooldown Time | |||||||
| 60 Hertz | 90 min | 90 min | 100 min | 100 min | 150 min | ||
| 50 Hertz | 110 min | 110 min | 120 min | 120 min | 180 min | ||
| Cryopump Weight | |||||||
| Lbs | 45 | 42 | 85 | 90 | 160 | ||
| Kg | 20 | 19 | 39 | 41 | 73 | ||
| Standard products shown. Please contact us for custom configurations and specifications. | |||||||