The STP has a market leading reputation for quality and reliability. Available in four different ranges – Ultra High Vacuum; High Throughput; Ultra Low Vibration and Integrated Controller – it is considered by many as the Rolls Royce of turbomolecular pumps.
Wide range of sizes, inlet flanges and special versions
The STP is trusted and relied upon by industrial and labotary customers worldwide
Exceptional 5-axis full maglev pump performance, with zero hydrocarbon lubrication
Automatic balancing systems, corrosion resistance versions, power failure protection
between services can be achieved with these pumps. No routine or preventive maintenance is required
The Advanced series offers high levels of throughput, perfect for your semiconductor etch and CVD processes:
The Ultra High Vacuum Low Vibration version incorporates all the features of the Ultra High Vacuum series, plus a built-in vibration isolator to bring you ultra-low vibration performance.
This all-in-one turbo pump solution eliminates the connection cable and rack conventionally required:
The Ultra High Vacuum series offers unrivalled reliability, performance, cleanliness and class-leading low vibration levels:
Unit | iX455 | iXR1606 | iXR1606 | iS2207 | iS2207 | iXA2206A | iXA3306C | iXA3306C | iXA4506C | |
Inlet flange* | ||||||||||
ISO | 100K/160K | 160F | 200F/250F | 200F | 250F | 250F | 250F | 320F | 320F | |
ICF | – | 203 | 253/305 | 253 | 305 | 305 | 305 | 356 | – | |
Pumping Speed | ||||||||||
N2 | l/s | 300/450 | 1000 | 1600 | 1850 | 2200 | 2200 | 2650 | 3200 | 4000 |
H2 | l/s | 300/460 | 800/ | 1200 | 700 | 750 | 1700 | 2050 | 2300 | 2700 |
Ar | l/s | – | – | – | 1650 | 2000 | 1900 | 2300 | 2800 | 3400 |
Compression ratio | ||||||||||
N2 | >108 | >108 | >108 | >108 | >108 | >108 | >108 | >108 | >108 | |
H2 | >1×104 | >1×104 | >1×103 | >1×103 | >1×103 | 1.0×104 | 2×103 | 2×103 | 1×103 | |
Ultimate pressure | Pa | 6.5×10-6 | 6.5×10-6 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 | 10-7 |