• +41 (0)32 926 26 06
  • info@plasmadiam.com
  • +41 (0)32 926 26 06
  • info@plasmadiam.com
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Edwards RGA

Edwards RGA

Edwards RGA

All RGAs are equipped with dedicated, easy to use software which allows you to track your process in real-time from your laptop and do detailed analysis of up to 16 different units. For those wanting a snapshot view, the units have a unique on-board display which can show you the main gas types as well as the overall pressure of your system without having to connect via a laptop.
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Download brochure

Total pressure measurement

Dual filament

On unit display

Customer replaceable parts

Protection of Ion source and EM

Degas function

The unique benefits

  • Total pressure measurement
  • Dual filament
  • On unit display
  • Customer replaceable parts
  • Degas function
  • Protection of Ion source and EM

RGAs do analysis of gases and their composition, this is needed for:

  • Leak detection and identification
  • Find and identify contaminants
  • Verify gas purity
  • Product/process quality assurance
  • Optimize process performance and yield
  • Process & equipment diagnostics and control

The perfect solution in a wide range of applications:

  • Semiconductor processes
  • Thin-film and display
  • Vacuum heat treatment
  • Vacuum freeze drying
  • Research & development
  • High energy physics

Edwards Presents Residual Gas Analysers

by Dr Sina Forster

An introduction to the Edwards PRA and WRA range of Residual Gas Analyers

PRA primary residual gas analyser

Edwards PRA RGAs deliver the perfect balance of high end performance and accessibility. Available in four variants to suit your process needs, whether you just need a basic model or something with more sensitivity/range, the PRA is the perfect starting point for analysing your processes.

WRA wide range residual gas analyser

Edwards WRA RGAs are our top of the line models, with market leading specifications. Available in two variants 1-200 or 1-300 amu, you can measure a wide range of gasses/by-products from your processes. This is paired with increased sensitivity compared to the PRA to allow for greater accuracy from your measurements

eRGA1 Residual Gas Analyser System

• Precise gas analysis with customizable options for differing pressures. Its compact design integrates an Edwards PRA/WRA Residual Gas Analyser and a T-station 85 turbomolecular pumping station.

• Choose from multiple inlet options for flexibility in connecting to any process. Ideal for leak detection, contaminant identification, gas purity verification, and process diagnostics.

• With user-friendly software and tabletop configuration, it’s easy to use.
Suitable for various applications and markets, the eRGA1 ensures accurate analysis with reliability and flexibility.

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S800

Compact hard PVD
Functional Coating

  • Compact system (W3400 x D3000 x H2300mm)
  • Utilities in a single part of the unit
  • Extremely short utility commissioning
  • Fast to install

General Information

  • Technology : Arc
  • Dimensions : W3400 x D3000 x H2300 mm
  • Vacuum chamber size : W800 x D800 x H1,150 mm
  • Vacuum chamber capacity : 730 l
  • Using plasma volume : D=550 x H720
  • Target : 727×178×18 mm (3Set) - 200/400/400A
  • Turntable : D436 × H727 mm
  • Power : 3×400V/120 kW
  • Software : Industrial PC system Simple and easy diagnosis and description system Remote diagnosis through data machine or IP

Coating types

  • Standards Coating : TiN, CrN, TiCN, TiAlN, AlTiN, etc.
  • Recipes can be selected : AlCrN, TiAlSiN, AlCrTiN, DLC, etc.
  • Capacity (24H)
  • Milling cutter : D6×50 mm = 1,800×5 = 9,000 pces - D16×95 mm = 450×5= 2,250 pces
  • Insert : D20×H6 mm = 2,340×5 = 11,700 pces
  • Hobs : D80×180 mm =24×5= 120 pces

Testing Chamber

Applications : The bench top system offered allows to reach and maintain pressures equivalent to “O” meter (Atmospheric pressure) to high level such 4000 meters and beyond, inside a test chamber.

Atmospheric Pressure Simulator Chamber

  • Programmable vacuum controller

High Vacuum Pumping Stations

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.
Plug & Pump

PLASMADIAM TURBOMOLECULAR PUMPING STATION:

  • Range of turbomolecular pump options
  • Choice of turbomolecular pump with speeds ranging from 85 to 930 ls-1
  • Choice of dry backing pumps with capacities ranging from 6 to 90 m3h-1

Vacuum Heat Treatment Furnace

Heat treatment to fix the shape of the spiral spring. The fixing heat treatment is carried out under the following conditions :
  • Between 10-7 mbar and 10-5 mbar, in an inert atmosphere
  • Temperature between 400°C and 1000°C
  • Time between 1h and 6h

Advantages of vacuum furnaces

  • Controlled heating
  • Reproducible process
  • High efficiency
  • Fasting heating & cooling
  • High Vacuum Pumping Group

Ultra High Vacuum System Bake Out

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.

Example

  • Temperature 300 degrees
  • Vacuum level 5.10-10 mbar
  • Fully automated cycles
  • LOG recording