The Spectra exhaust management system is a cost-effective, reliable and high performance abatement solution for the latest generation of Flat Panel Display (FPD) and Solar Cell manufacturing processes.
Spectra meets high performance with an environmental conscience
Abatement
Unique 4-stage combustion technology
Efficient SiH4 abatement
High H2 flow abatement capacity
Excellent management of high flows of NF3 / F2
High NH3 abatement capacity
Modular design of abatement and particulate management
80% powder removal efficiency
Acid gas scrubbing
Integrated wet scrubber
Water Recirculation Unit to optimise water consumption
Powder Capture
Spectra ZW2 – water cooled abatement with particulate removal
Modular Wet Electrostatic Precipitator (WESP)
Removal of 99% particulate
High powder load handling capability
Low cost of ownership relative to alternative solutions
Software : Industrial PC system Simple and easy diagnosis and description system Remote diagnosis through data machine or IP
Coating types
Standards Coating : TiN, CrN, TiCN, TiAlN, AlTiN, etc.
Recipes can be selected : AlCrN, TiAlSiN, AlCrTiN, DLC, etc.
Capacity (24H)
Milling cutter : D6×50 mm = 1,800×5 = 9,000 pces - D16×95 mm = 450×5= 2,250 pces
Insert : D20×H6 mm = 2,340×5 = 11,700 pces
Hobs : D80×180 mm =24×5= 120 pces
Testing Chamber
Applications : The bench top system offered allows to reach and maintain pressures equivalent to “O” meter (Atmospheric pressure) to high level such 4000 meters and beyond, inside a test chamber.
Atmospheric Pressure Simulator Chamber
Programmable vacuum controller
High Vacuum Pumping Stations
Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.
Choice of turbomolecular pump with speeds ranging from 85 to 930 ls-1
Choice of dry backing pumps with capacities ranging from 6 to 90 m3h-1
Vacuum Heat Treatment Furnace
Heat treatment to fix the shape of the spiral spring. The fixing heat treatment is carried out under the following conditions :
Between 10-7 mbar and 10-5 mbar, in an inert atmosphere
Temperature between 400°C and 1000°C
Time between 1h and 6h
Advantages of vacuum furnaces
Controlled heating
Reproducible process
High efficiency
Fasting heating & cooling
High Vacuum Pumping Group
Ultra High Vacuum System Bake Out
Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.
