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Vacuum coating systems

special machines

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Vacuum
oven

special machines

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Special
vacuum

& Coating r&d

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Electrical & Automatism

Engineering

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01

Vacuum coating systems

s800v

Compact hard PVD Functional Coating S800

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s1000v

Compact Hard PVD Functionnal Coating S1000

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bt150

HHV BT150 & BT300 bench top coater

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HHV-Auto-306-laboratory-coater

HHV Auto 306 laboratory coater

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ats500

HHV ATS 500 Research and production coater

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tf500

HHV TF 500/600/800 box coating systems

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02

Vacuum Oven

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LVO - Low Vacuum Oven

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MVO - Medium Vacuum Oven

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HVO - High Vacuum Oven

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03

Special vacuum & Coating R&D

  • Spiral spring heat treatment
  • Vacuum & degasing machine
  • Drying
  • Vacuum cold-traps
  • Vacuum oven
  • All special developments including mechanical and automatism engineering

04

Electrical & Automatism engineering

  • Definition of needs and implementation of multipolar schemes on Eplan
  • 3D integration of components and viewing of mounting plates
  • Preparation of component nomenclature – preparation of purchase lists
  • Assembly and wiring according to design and plans supplied or produced
  • Wire and Element Tracking
  • Electrical test according to EN 60204-1 and preparation of a control report
electric-board
Electrical board

Complete studies and design of electrical board installations.

boxe
Electrical cabinets and boxes

Design and installation of electrical cabinets and boxes

cable
Equipment cabling

Installation of specialized equipment cabling

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Designed & Developed by imaqa®imaqa®imaqa®

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Compact hard PVD
Functional Coating

S800

  • Compact system (H2200 x W1650 x L3500)
  • Utilities in a single part of the unit
  • Extremely short utility commissioning
  • Fast to install

S800

Performances

  • High productivity, fast cycle time
  • Easy to use, easy to service and maintain
  • Up to 1-4 materials for coating design
  • High performance coating
  • Glow discharge etching and metal ion etching
  • Recipes: TiN, CrN, TiCN, AlTiN, AlCrN, AlTiSiN, ...

Specifications

  • Internal chamber size (mm): 800 x 1050
  • Usable plasma volume (mm): D500 x H550
  • Bias power supply: DC pulsed 15 or 20 kW
  • Arc power supply: DC 250 A or 400 A pulsed
  • Shank tools capacity Ø6 x 50 mm: 1500 pcs/batch
  • Hobs tools capacity Ø80 x 180 mm: 24 pcs/batch
Download brochure

Compact hard PVD
Functional Coating

S1000

  • Compact system (H2200 x W1650 x L3900)
  • Utilities in a single part of the unit
  • Extremely short utility commissioning
  • Fast to install

S1000

Performances

  • High productivity, fast cycle time
  • Easy to use, easy to service and maintain
  • Up to 1-4 materials for coating design
  • High performance coating
  • Glow discharge etching and metal ion etching
  • Recipes: TiN, CrN, TiCN, AlTiN, AlCrN, AlTiSiN, ...

Specifications

  • Internal chamber size (mm): 1000 x 1250
  • Usable plasma volume (mm): D700 x H700
  • Bias power supply: DC pulsed 20 kW
  • Arc power supply: 400 A pulsed
  • Shank tools capacity Ø6 x 50 mm: 3000 pcs/batch
  • Hobs tools capacity Ø80 x 180 mm: 48 pcs/batch
bt150
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HHV Bench Top Sputter Coaters

BT150-300

  • New bench-top deposition tools for EM sample prep and R&D
  • Touch screen control system for automatic sample coating
  • Wide range of sample stages
  • Integrated film thickness monitoring
  • Easy target change

BT150

Process options

  • Metals sputtering for SEM
  • Carbon fibre evaporation for TEM
  • Carbon rod evaporation for TEM
  • Resistance evaporation
  • Glow discharge
  • Water-cooled SEM stage with bias function
  • Rotary stages for SEM stubs
  • Rotary stages for wafer substrates
  • Integrated film thickness monitor

Control features

  • Fully automatic touch-screen control
  • User editable process contrai
  • With storage for 30 recipes
  • Automatic recognition of process accessories
  • Rotary and turbo pump options
HHV-Auto-306-laboratory-coater
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Vacuum Coating System

Auto 306

Auto306 is available with glass bell jar and glass cylinder chamber options. Also available is the versatile FL400 front-loading box chamber which provides additional height and width for the fitting of extra process accessories.

Auto306

Features and Benefits

  • Touch screen PLC control of vacuum
  • Choice of deposition sources and power supplies
  • Range of work holders
  • Range of vacuum chambers ta suit applications

F

  • Intelligent high vacuum valve protects pumps and samples
  • Compact unit minimises space requirements
  • No compressed air required
  • Fully interlocked for operator safety
ats500
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Box Coating Systems

ATS500

  • Resistance evaporation sources
  • Electron beam sources for high-rate evaporation and lift-off processes
  • lon-beam assistance for optical applications or substrate cleaning
  • Combination systems featuring two or more of the above
  • Temperature controlled evaporation sources for OLED and organic photovoltaic applications

ATS500

Features and Benefits

  • Flexibility - wide range of processes in a single system package
  • Ion beam processes - for optical coating applications
  • Cost - ATS 500 is designed as an affordable, versatile system
tf500
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Box Coating Systems

TF500/600

The HHV TF500 and TF600 are developed for enhanced levels of process capability. A choice of chamber sizes and accessories, deposition techniques, work holders, load locks and pumping options allows the system to be configured to your exact needs. TF500 allows multiple sources to be accommodated and TF600 adds the benefits of ion beam processing.

TF500

TF500/600 system features

  • Wide range of chamber size options allows optimum source to substrate configurations
  • Resistance and electron beam evaporation
  • DC and RF sputtering with upward and download configuration
  • Ion beam sources for etch and ion-assisted deposition
  • Load locks and sample handling

F

  • High temperature substrate heating to 900°C
  • PLC control option for semi-automatic operation
  • PC control option for fully-automated deposition process with recipe control, data logging and system diagnostics
  • Choice of turbo pumps from 500 l/s to 2200 l/s
  • Choice of cryo pumps from 1500 l/s to 3500 l/s
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