On-Board® Cryopumps

On-Board® Cryopumps

Improve vacuum

On-Board Cryopumps, with fully integrated controls and supporting peripherals, deliver superior up-time and consistent performance to increase overall tool productivity and up-time.

Accelerate integration and improve system operation

Edwards CTI-Cryogenics On-Board vacuum pumps speed up integration and improve system operation – known as the world standard for reliability and performance.

Key Features

On-Board Cryopump Model

On-Board Cryopump Model 4F 8 8F 10 10F 250F 400 500
Pumping Speeds – litres/sec.
Water Vapour 1,100 4,000 4,000 9,000 9,500 6,500 17,500 30,000
Air 370 1,500 1,500 3,000 3,600 2,200 6,000 10,000
Hydrogen 370 2,500 2,200 5,000 6,000 3,200 12,000 12,000
Argon 310 1,200 1,200 2,500 3,000 1,800 5,000 8,400
Capacity – std. litre
Argon 210 1,000 1,000 2,000 2,000 1,000 2,500 6,000
Hydrogen (5×10-6 Torr) 3 17 12 24 24 16 42 45
Nominal Regeneration Time (cold to cold)
First and Second Stage 75 min 2.5 hrs 2.5 hrs 2.5 hrs 2.5 hrs <3.3 hrs 3 hrs <3.8 hrs
Second Stage <1 hr <1 hr <1 hr <1 hr <1 hr <1.5 hrs <1.5 hrs –

S800

Compact hard PVD
Functional Coating

General Information

Coating types

Testing Chamber

Applications : The bench top system offered allows to reach and maintain pressures equivalent to “O” meter (Atmospheric pressure) to high level such 4000 meters and beyond, inside a test chamber.

Atmospheric Pressure Simulator Chamber

High Vacuum Pumping Stations

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.

PLASMADIAM TURBOMOLECULAR PUMPING STATION:

Vacuum Heat Treatment Furnace

Heat treatment to fix the shape of the spiral spring. The fixing heat treatment is carried out under the following conditions :

Advantages of vacuum furnaces

Ultra High Vacuum System Bake Out

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.

Example