• +41 (0)32 926 26 06
  • info@plasmadiam.com
  • +41 (0)32 926 26 06
  • info@plasmadiam.com
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On-Board® IS 320F XVS

On-Board® IS 320F XVS

Improve vacuum

The CTI-Cryogenics On-Board IS XVS 320F Cryopump maintains Edwards’ tradition of delivering the most reliable and best performing implant cryopumps on the market.
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Reach new levels of cryopump performance

The On-Board® IS 320F XVS cryopump is designed to deliver the highest hydrogen pumping performance for improved process yield and throughput, offering the perfect answer to today’s Ion Implant applications challenges. The intelligent system control integrated in the cryopump ensures better process quality, vacuum consistency, and uptime, while providing real-time system information for optimum control of array temperatures. Vacuum quality is enhanced by automatic adaptation to changing thermal/gas loading conditions.

Stable Vacuum Performance

  • Reduced H2 Pumping Speed Variation between Regenerations
  • Reduced Impact to H2 Pumping Speed due to Photoresist Contamination
  • Optimized stable array temperatures

Enhanced Vacuum Performance

  • High H2 Pumping Speed-15,500 L/S
  • High H2 Capacity – 40 STD-L

System Compatibility

  • On-Board IS Cryopump systems
  • IS-1000, IS-2000V, IS-1800 XVS Compressors
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S800

Compact hard PVD
Functional Coating

  • Compact system (W3400 x D3000 x H2300mm)
  • Utilities in a single part of the unit
  • Extremely short utility commissioning
  • Fast to install

General Information

  • Technology : Arc
  • Dimensions : W3400 x D3000 x H2300 mm
  • Vacuum chamber size : W800 x D800 x H1,150 mm
  • Vacuum chamber capacity : 730 l
  • Using plasma volume : D=550 x H720
  • Target : 727×178×18 mm (3Set) - 200/400/400A
  • Turntable : D436 × H727 mm
  • Power : 3×400V/120 kW
  • Software : Industrial PC system Simple and easy diagnosis and description system Remote diagnosis through data machine or IP

Coating types

  • Standards Coating : TiN, CrN, TiCN, TiAlN, AlTiN, etc.
  • Recipes can be selected : AlCrN, TiAlSiN, AlCrTiN, DLC, etc.
  • Capacity (24H)
  • Milling cutter : D6×50 mm = 1,800×5 = 9,000 pces - D16×95 mm = 450×5= 2,250 pces
  • Insert : D20×H6 mm = 2,340×5 = 11,700 pces
  • Hobs : D80×180 mm =24×5= 120 pces

Testing Chamber

Applications : The bench top system offered allows to reach and maintain pressures equivalent to “O” meter (Atmospheric pressure) to high level such 4000 meters and beyond, inside a test chamber.

Atmospheric Pressure Simulator Chamber

  • Programmable vacuum controller

High Vacuum Pumping Stations

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.
Plug & Pump

PLASMADIAM TURBOMOLECULAR PUMPING STATION:

  • Range of turbomolecular pump options
  • Choice of turbomolecular pump with speeds ranging from 85 to 930 ls-1
  • Choice of dry backing pumps with capacities ranging from 6 to 90 m3h-1

Vacuum Heat Treatment Furnace

Heat treatment to fix the shape of the spiral spring. The fixing heat treatment is carried out under the following conditions :
  • Between 10-7 mbar and 10-5 mbar, in an inert atmosphere
  • Temperature between 400°C and 1000°C
  • Time between 1h and 6h

Advantages of vacuum furnaces

  • Controlled heating
  • Reproducible process
  • High efficiency
  • Fasting heating & cooling
  • High Vacuum Pumping Group

Ultra High Vacuum System Bake Out

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.

Example

  • Temperature 300 degrees
  • Vacuum level 5.10-10 mbar
  • Fully automated cycles
  • LOG recording