• +41 (0)32 926 26 06
  • info@plasmadiam.com
  • +41 (0)32 926 26 06
  • info@plasmadiam.com
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On-Board® IS

On-Board® IS

Improve vacuum

Edwards CTI-Cryogenics IS cryopump systems leverage innovative, high-efficiency technology to provide unparalleled vacuum performance and energy efficiency.

Unparalleled vacuum performance and energy efficiency

A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. On-Board IS cryopumps deliver the highest uptime, best productivity, and lowest overall cost of ownership of any cryopump system available today, backed by Edwards highly responsive global service and support network.

Key Features

  • The patented distributed control system monitors and constantly adjusts individual elements of the cryopump system
  • Maintains optimal system-wide vacuum performance, delivering exceptional process consistency
  • Quickest regenerations in single and multi-pump configurations
  • Low consumption of energy and cooling water with no compromise in vacuum performance
  • Easy system integration
  • Fast production installation
  • Enhanced remote monitoring for both preventive and predictive maintenance
Edwards CTI On-Board® IS 320Fx Cryopump - Data sheet
Edwards CTI-Cryogenics On-Board IS XP Cryopump - Data sheet
Edwards CTI-Cryogenics On-Board IS 250FE and 250FX Cryopumps - Data sheet
Edwards CTI-Cryogenics On-Board IS 500 Cryopump Data sheet
Edwards CTI On-Board® IS 320Fx Cryopump - Data sheet

IS 320FX Cryopump

The On-Board® IS 320FX Cryopump, developed specifically to address the challenges of today’s Ion Implant processes, provides enhanced hydrogen pumping speed and capacity, while maintaining the quality, performance and reliability you have come to expect. 

  • Specifically designed for Ion Implant applications
  • Optimised for tool throughput
  • Intelligent “self-adjusting” technology
  • Lower cost of ownership
  • Increased uptime

IS XP

The On-Board® IS XP Cryopump delivers increased capacity for PVD applications to achieve maximum productivity while maintaining process transparency. At the same time, it leverages the proven energy efficiency, consistent performance and low cost of ownership you have come to expect from the On-Board® IS. 

  • Provides capacity overhead for future process improvements
  • Lower cost of ownership
  • Increased up-time
  • Intelligent “self-adjusting” technology for consistent vacuum performance
Download brochure

S800

Compact hard PVD
Functional Coating

  • Compact system (W3400 x D3000 x H2300mm)
  • Utilities in a single part of the unit
  • Extremely short utility commissioning
  • Fast to install

General Information

  • Technology : Arc
  • Dimensions : W3400 x D3000 x H2300 mm
  • Vacuum chamber size : W800 x D800 x H1,150 mm
  • Vacuum chamber capacity : 730 l
  • Using plasma volume : D=550 x H720
  • Target : 727×178×18 mm (3Set) - 200/400/400A
  • Turntable : D436 × H727 mm
  • Power : 3×400V/120 kW
  • Software : Industrial PC system Simple and easy diagnosis and description system Remote diagnosis through data machine or IP

Coating types

  • Standards Coating : TiN, CrN, TiCN, TiAlN, AlTiN, etc.
  • Recipes can be selected : AlCrN, TiAlSiN, AlCrTiN, DLC, etc.
  • Capacity (24H)
  • Milling cutter : D6×50 mm = 1,800×5 = 9,000 pces - D16×95 mm = 450×5= 2,250 pces
  • Insert : D20×H6 mm = 2,340×5 = 11,700 pces
  • Hobs : D80×180 mm =24×5= 120 pces

Testing Chamber

Applications : The bench top system offered allows to reach and maintain pressures equivalent to “O” meter (Atmospheric pressure) to high level such 4000 meters and beyond, inside a test chamber.

Atmospheric Pressure Simulator Chamber

  • Programmable vacuum controller

High Vacuum Pumping Stations

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.
Plug & Pump

PLASMADIAM TURBOMOLECULAR PUMPING STATION:

  • Range of turbomolecular pump options
  • Choice of turbomolecular pump with speeds ranging from 85 to 930 ls-1
  • Choice of dry backing pumps with capacities ranging from 6 to 90 m3h-1

Vacuum Heat Treatment Furnace

Heat treatment to fix the shape of the spiral spring. The fixing heat treatment is carried out under the following conditions :
  • Between 10-7 mbar and 10-5 mbar, in an inert atmosphere
  • Temperature between 400°C and 1000°C
  • Time between 1h and 6h

Advantages of vacuum furnaces

  • Controlled heating
  • Reproducible process
  • High efficiency
  • Fasting heating & cooling
  • High Vacuum Pumping Group

Ultra High Vacuum System Bake Out

Vacuum Ovens bake, degas, heat, dry and anneal components for the electronics, aerospace and defence industries. Our systems come in multiple cylindrical or cubic configurations.

Example

  • Temperature 300 degrees
  • Vacuum level 5.10-10 mbar
  • Fully automated cycles
  • LOG recording