Specifically designed to safely remove hazardous gases from vacuum pump exhausts on semiconductor processes.
The GRC is a unique hot bed reactor that chemically destroys toxic gases. It treats the widest range and mixture of gases in one system without creating new effluent disposable problems. A proprietary mixture of inorganic granules is held within a welded stainless steel cartridge. This is maintained at an elevated temperature by insertion in a tubular electrical heater. Hazardous exhaust gases passing into the cartridge are chemically reacted to completion and converted into insert stable inorganic salts.
DRY system, can be connected directly to vacuum pump exhaust
No risk of backstreaming moisture
No problems with desorption of toxic gases
Complete chemical conversion of gases into inert stable salts
Cartridge changing is easy and hazard free
No fuel and flames with the associated risk of producing toxic by-products
Minimum service connections required Inlet pipe work can be maintained at 120 degree Celsius to reduce solids deposition