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Vacuum Components

Feedthroughs

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Motion & Manipulation

Pump Service Kits

Vacuum Pumps & Instrumentation

Small Dry Pumps

Primary Vacuum

Oil Sealed Pumps

Primary Vacuum

Turbomolecular Pumps

High Vacuum

Industrial Dry Pumps

Dry Pumps

Semiconductor Dry Pumps

Primary Vaccum

Chemical Dry Pumps

Dry Pumps

Mechanical Booster Pumps

Booster Pumps

Diffusion Pumps

High Vacuum

Ultra High Vacuum Pumps

UVH-XVH

Vacuum Measurement

Gauge

Calibration System

Calibration System

Turbomolecular Pumping Stations

High Vacuum

Leak Detector

Detection

Residual Gas Analysers

Edwards RGA

Liquid Ring Pumps

Process Equipments

Custom Engineered Products

Process Equipments

Environmental Solutions

Unrivalled abatement performance

Cryopumps

Improve Vacuum

Cryochillers

Improve Vacuum

Integrated Solutions

Maximising SubFab availability

iTrap®

Process Gas Analyzers

Standard Vacuum Oven

LVO - Low Vacuum Oven

MVO - Medium Vacuum Oven

HVO - High Vacuum Oven

Standard Coating Systems

Compact hard PVD Functional Coating S800

HHV BT150 & BT300 bench top coater

HHV Auto 306 laboratory coater

HHV ATS 500 Research and production coater

Compact hard PVD
Functional Coating

S800

S800

General Information

Coating types

Capacity (24H)
• Milling cutter
D6×50 mm = 1,800×5 = 9,000 pces
D16×95 mm = 450×5= 2,250 pces
• Insert : D20×H6 mm = 2,340×5 = 11,700 pces
• Hobs : D80×180 mm =24×5= 120 pces

HHV Bench Top Sputter Coaters

BT150-300

BT150

Process options

Control features

Vacuum Coating System

Auto 306

Auto306 is available with glass bell jar and glass cylinder chamber options. Also available is the versatile FL400 front-loading box chamber which provides additional height and width for the fitting of extra process accessories.

Auto306

Features and Benefits

F

Box Coating Systems

ATS500

ATS500

Features and Benefits