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MaxCool Cryochillers

Improve Vacuum

Edwards Polycold® MaxCool Cryochillers are closed loop cryogenic refrigeration systems that effectively capture water vapour, which comprises 65% to 95% of the residual gas in high vacuum systems.
MaxCool Cryochillers are the most cost-effective upgrade that you can add to any diffusion-pumped, turbopumped, or helium-cryopumped system.

Achieve lower vacuum levels quickly

These cryochillers can be used to capture water vapour and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool Cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing. The different models in our range provide 2,000, 2,500 or 4,000 watts of cooling.

Water Vapour Pumping

Water vapour is typically the most reactive contaminant present in high vacuum systems. With our MaxCool Cryochillers you can expect an increase in product throughput in your existing system of 20% to 100% and improve quality of deposition.

The MaxCool Advantage

Compliant with European Application Refrigerants (EC 1005/2009)

When added to your vacuum system, MaxCool Cryochillers can dramatically reduce pumpdown times and increase product throughput. The MaxCool will pump water vapour within minutes from start and can defrost in less than four minutes, giving true fast-cycle capability. It also has an option called Rapid Cool to Cool, which eliminates the waiting period after defrost, enabling your system to perform more production cycles per shift. Using patented Polycold® refrigerant mixtures, our MaxCool Cryochillers work on the principle of Meissner trapping. Water vapour is captured by condensation on a cryogenically cooled surface, called a Meissner coil. The Meissner (cryocoil) is mounted directly in the vacuum chamber so conductance is not limited by ports, manifolds, valves and baffles. The cryocoil is easy to install and can be adapted to fit any system. It does not need a high vacuum valve.